Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649021 | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Saburou Kanai | 2003-11-18 |
| 6645871 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-11-11 |
| 6618692 | Remote diagnostic system and method for semiconductor manufacturing equipment | Nobuo Tsumaki, Hideyuki Yamamoto | 2003-09-09 |
| 6610170 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-08-26 |
| 6610171 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-08-26 |
| 6596551 | Etching end point judging method, etching end point judging device, and insulating film etching method using these methods | Tatehito Usui, Ken Yoshioka, Shoji Ikuhara, Kouji Nishihata, Tetsunori Kaji +1 more | 2003-07-22 |
| 6558100 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Mitsuru Suehiro, Hideyuki Yamamoto, Katsuya Watanabe | 2003-05-06 |
| 6544379 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-04-08 |
| 6537012 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Mitsuru Suehiro, Hideyuki Yamamoto, Katsuya Watanabe | 2003-03-25 |
| 6524428 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-02-25 |
| 6506686 | Plasma processing apparatus and plasma processing method | Toshio Masuda, Ryoji Fukuyama, Tomoyuki Tamura | 2003-01-14 |
| 6503364 | Plasma processing apparatus | Toshio Masuda, Tatehito Usui, Shigeru Shirayone, Mitsuru Suehiro | 2003-01-07 |