Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662465 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-12-16 |
| 6655044 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-12-02 |
| 6645871 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-11-11 |
| 6634116 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-10-21 |
| 6625899 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-09-30 |
| 6610171 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-08-26 |
| 6610170 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-08-26 |
| 6588121 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-07-08 |
| D473354 | Vacuum processing equipment configuration | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-04-15 |
| 6544379 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-04-08 |
| 6524428 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-02-25 |
| 6505415 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-01-14 |