Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664738 | Plasma processing apparatus | Masatsugu Arai, Ryujiro Udo, Masanori Kadotani, Motohiko Yoshigai | 2003-12-16 |
| 6645871 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-11-11 |
| 6610170 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-08-26 |
| 6610171 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-08-26 |
| 6544379 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-04-08 |
| 6524428 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-02-25 |