Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664738 | Plasma processing apparatus | Masatsugu Arai, Ryujiro Udo, Naoyuki Tamura, Masanori Kadotani | 2003-12-16 |
| 6660647 | Method for processing surface of sample | Tetsuo Ono, Takafumi Tokunaga, Tadashi Umezawa, Tatsumi Mizutani, Tokuo Kure +3 more | 2003-12-09 |
| 6620737 | Plasma etching method | Go Saito, Masamichi Sakaguchi, Hitoshi Kobayashi, Satoshi Tani | 2003-09-16 |
| 6617255 | Plasma processing method for working the surface of semiconductor devices | Takao Arase, Go Saito, Masamichi Sakaguchi, Hiroaki Ishimura, Takahiro Shimomura | 2003-09-09 |