Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620737 | Plasma etching method | Masamichi Sakaguchi, Hitoshi Kobayashi, Motohiko Yoshigai, Satoshi Tani | 2003-09-16 |
| 6617255 | Plasma processing method for working the surface of semiconductor devices | Takao Arase, Motohiko Yoshigai, Masamichi Sakaguchi, Hiroaki Ishimura, Takahiro Shimomura | 2003-09-09 |