Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662465 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-12-16 |
| 6655044 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-12-02 |
| 6634116 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-10-21 |
| 6625899 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-09-30 |
| 6596551 | Etching end point judging method, etching end point judging device, and insulating film etching method using these methods | Tatehito Usui, Ken Yoshioka, Shoji Ikuhara, Kazue Takahashi, Tetsunori Kaji +1 more | 2003-07-22 |
| 6588121 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-07-08 |
| D473354 | Vacuum processing equipment configuration | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-04-15 |
| 6505415 | Vacuum processing apparatus | Shigekazu Kato, Tsunehiko Tsubone, Atsushi Itou | 2003-01-14 |