Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656752 | Ion current density measuring method and instrument, and semiconductor device manufacturing method | Nobuyuki Mise, Masato Ikegawa, Kazuo Nojiri, Kazuyuki Tsunokuni, Tetsuo Ono | 2003-12-02 |
| 6596551 | Etching end point judging method, etching end point judging device, and insulating film etching method using these methods | Ken Yoshioka, Shoji Ikuhara, Kouji Nishihata, Kazue Takahashi, Tetsunori Kaji +1 more | 2003-07-22 |
| 6537832 | Measuring apparatus and film formation method | Toru Otsubo | 2003-03-25 |
| 6503364 | Plasma processing apparatus | Toshio Masuda, Shigeru Shirayone, Kazue Takahashi, Mitsuru Suehiro | 2003-01-07 |