Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558100 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe | 2003-05-06 |
| 6549393 | Semiconductor wafer processing apparatus and method | Seiichiro Kanno, Hironobu Kawahara, Saburo Kanai, Ken Yoshioka | 2003-04-15 |
| 6537012 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe | 2003-03-25 |
| 6503364 | Plasma processing apparatus | Toshio Masuda, Tatehito Usui, Shigeru Shirayone, Kazue Takahashi | 2003-01-07 |