Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646233 | Wafer stage for wafer processing apparatus and wafer processing method | Ken Yoshioka, Ryoji Nishio, Saburou Kanai, Hideki Kihara, Koji Okuda | 2003-11-11 |
| 6590179 | Plasma processing apparatus and method | Junichi Tanaka, Hiroyuki Kitsunai, Ryoji Nishio, Hideyuki Yamamoto | 2003-07-08 |
| 6583979 | Electrostatically attracting electrode and a method of manufacture thereof | Kazue Takahasi, Youichi Itou, Saburo Kanai | 2003-06-24 |
| 6549393 | Semiconductor wafer processing apparatus and method | Hironobu Kawahara, Mitsuru Suehiro, Saburo Kanai, Ken Yoshioka | 2003-04-15 |