Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616759 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamato, Shoji Ikuhara +1 more | 2003-09-09 |
| 6590179 | Plasma processing apparatus and method | Hiroyuki Kitsunai, Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto | 2003-07-08 |
| 6551178 | Reamer with adjustable expansion/contraction, and bore finishing machine comprising the same | Toshiyuki Nomoto, Eiji Takezawa | 2003-04-22 |