Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616759 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamato, Shoji Ikuhara +1 more | 2003-09-09 |
| 6590179 | Plasma processing apparatus and method | Junichi Tanaka, Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto | 2003-07-08 |