Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646233 | Wafer stage for wafer processing apparatus and wafer processing method | Seiichiro Kanno, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Koji Okuda | 2003-11-11 |
| 6590179 | Plasma processing apparatus and method | Junichi Tanaka, Hiroyuki Kitsunai, Seiichiro Kanno, Hideyuki Yamamoto | 2003-07-08 |