Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649021 | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Kazue Takahashi | 2003-11-18 |
| 6646233 | Wafer stage for wafer processing apparatus and wafer processing method | Seiichiro Kanno, Ken Yoshioka, Ryoji Nishio, Hideki Kihara, Koji Okuda | 2003-11-11 |