Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656846 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +4 more | 2003-12-02 |
| 6649021 | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Ken Yoshioka, Kazue Takahashi, Saburou Kanai | 2003-11-18 |
| 6624084 | Plasma processing equipment and plasma processing method using the same | Kenji Maeda, Yutaka Omoto, Ichiro Sasaki | 2003-09-23 |
| 6558100 | Vacuum processing apparatus and a vacuum processing system | Mitsuru Suehiro, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe | 2003-05-06 |
| 6549393 | Semiconductor wafer processing apparatus and method | Seiichiro Kanno, Mitsuru Suehiro, Saburo Kanai, Ken Yoshioka | 2003-04-15 |
| 6537012 | Vacuum processing apparatus and a vacuum processing system | Mitsuru Suehiro, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe | 2003-03-25 |
| 6537417 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6537415 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |