Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660647 | Method for processing surface of sample | Tetsuo Ono, Takafumi Tokunaga, Tadashi Umezawa, Motohiko Yoshigai, Tatsumi Mizutani +3 more | 2003-12-09 |
| 6656846 | Apparatus for processing samples | Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada, Keizo Kuroiwa +4 more | 2003-12-02 |
| 6562695 | Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing | Norio Suzuki, Hiroyuki Ichizoe, Keiji Okamoto, Shinichi Horibe, Kozo Watanabe +6 more | 2003-05-13 |
| 6559006 | Semiconductor integrated circuit and method for manufacturing the same | Shuji Ikeda, Yasuko Yoshida, Kenji Shiozawa, Mitsuyuki Kimura, Norio Nakagawa +4 more | 2003-05-06 |
| 6537417 | Apparatus for processing samples | Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada, Keizo Kuroiwa +5 more | 2003-03-25 |
| 6537415 | Apparatus for processing samples | Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada, Keizo Kuroiwa +5 more | 2003-03-25 |
| 6512245 | Semiconductor integrated circuit device | Shuji Ikeda, Satoshi Meguro, Kyoichiro Asayama, Eri Fujita, Koichiro Ishibashi +8 more | 2003-01-28 |
| 6509277 | Method of manufacturing semiconductor integrated circuit device having insulatro film formed from liquid containing polymer of silicon, oxygen, and hydrogen | Masayoshi Saito, Katsuhiko Hotta, Masayoshi Hirasawa, Hiroyuki Uchiyama, Hiroyuki Maruyama +1 more | 2003-01-21 |
| 6503794 | Semiconductor integrated circuit device and method for manufacturing the same | Kozo Watanabe, Atsushi Ogishima, Masahiro Moniwa, Syunichi Hashimoto, Kiyonori Ohyu +2 more | 2003-01-07 |