Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562695 | Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing | Norio Suzuki, Hiroyuki Ichizoe, Masayuki Kojima, Shinichi Horibe, Kozo Watanabe +6 more | 2003-05-13 |