Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638811 | Method of manufacturing a semiconductor integrated circuit device having a capacitor | Masayoshi Saito, Yoshitaka Nakamura, Hidekazu Goto, Keizo Kawakita, Satoru Yamada +8 more | 2003-10-28 |
| 6605530 | Method for fabricating semiconductor integrated circuit | Yoshitaka Nakamura, Tsuyoshi Tamaru, Naoki Fukuda, Hidekazu Goto, Isamu Asano +5 more | 2003-08-12 |
| 6509277 | Method of manufacturing semiconductor integrated circuit device having insulatro film formed from liquid containing polymer of silicon, oxygen, and hydrogen | Masayoshi Saito, Katsuhiko Hotta, Masayuki Kojima, Hiroyuki Uchiyama, Hiroyuki Maruyama +1 more | 2003-01-21 |