Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509277 | Method of manufacturing semiconductor integrated circuit device having insulatro film formed from liquid containing polymer of silicon, oxygen, and hydrogen | Masayoshi Saito, Katsuhiko Hotta, Masayoshi Hirasawa, Masayuki Kojima, Hiroyuki Uchiyama +1 more | 2003-01-21 |