Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638811 | Method of manufacturing a semiconductor integrated circuit device having a capacitor | Yoshitaka Nakamura, Hidekazu Goto, Keizo Kawakita, Satoru Yamada, Toshihiro Sekiguchi +8 more | 2003-10-28 |
| 6528403 | Fabrication process of a semiconductor integrated circuit device | Yoshikazu Tanabe, Isamu Asano, Makoto Yoshida, Naoki Yamamoto, Nobuyoshi Natsuaki | 2003-03-04 |
| 6509277 | Method of manufacturing semiconductor integrated circuit device having insulatro film formed from liquid containing polymer of silicon, oxygen, and hydrogen | Katsuhiko Hotta, Masayoshi Hirasawa, Masayuki Kojima, Hiroyuki Uchiyama, Hiroyuki Maruyama +1 more | 2003-01-21 |
| 6503819 | Fabrication process of a semiconductor integrated circuit device | Yoshikazu Tanabe, Isamu Asano, Makoto Yoshida, Naoki Yamamoto, Nobuyoshi Natsuaki | 2003-01-07 |