Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653594 | Consumable electrode gas shielded arc welding method and apparatus | Terumi Nakamura, Kazuo Hiraoka, Chiaki Shiga, Koji Nakamura | 2003-11-25 |
| 6618692 | Remote diagnostic system and method for semiconductor manufacturing equipment | Kazue Takahashi, Nobuo Tsumaki | 2003-09-09 |
| 6590179 | Plasma processing apparatus and method | Junichi Tanaka, Hiroyuki Kitsunai, Ryoji Nishio, Seiichiro Kanno | 2003-07-08 |
| 6558100 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Mitsuru Suehiro, Kazue Takahashi, Katsuya Watanabe | 2003-05-06 |
| 6537012 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Mitsuru Suehiro, Kazue Takahashi, Katsuya Watanabe | 2003-03-25 |