Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583979 | Electrostatically attracting electrode and a method of manufacture thereof | Kazue Takahasi, Youichi Itou, Seiichiro Kanno | 2003-06-24 |
| 6549393 | Semiconductor wafer processing apparatus and method | Seiichiro Kanno, Hironobu Kawahara, Mitsuru Suehiro, Ken Yoshioka | 2003-04-15 |