Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626268 | Elevator door opening and closing device and opening and closing control method | Yasuyuki Oikawa | 2003-09-30 |
| 6616759 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamato +1 more | 2003-09-09 |
| 6533075 | Elevator group supervisory control system for processing hall call information | — | 2003-03-18 |
| 6506686 | Plasma processing apparatus and plasma processing method | Kazue Takahashi, Ryoji Fukuyama, Tomoyuki Tamura | 2003-01-14 |
| 6503364 | Plasma processing apparatus | Tatehito Usui, Shigeru Shirayone, Kazue Takahashi, Mitsuru Suehiro | 2003-01-07 |