Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656846 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +4 more | 2003-12-02 |
| 6656752 | Ion current density measuring method and instrument, and semiconductor device manufacturing method | Nobuyuki Mise, Tatehito Usui, Masato Ikegawa, Kazuyuki Tsunokuni, Tetsuo Ono | 2003-12-02 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Sukeyoshi Tsunekawa, Toshiyuki Arai, Miwako Nakahara +3 more | 2003-08-19 |
| 6555464 | Semiconductor device and method of manufacturing the same | Shinichi Fukada, Takashi Yunogami, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2003-04-29 |
| 6537417 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6537415 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6528400 | Method of manufacturing a semiconductor device | Shinichi Fukada, Takashi Yunogami, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2003-03-04 |