Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664184 | Method for manufacturing semiconductor device having an etching treatment | Miwako Nakahara, Kazuto Watanabe | 2003-12-16 |
| 6613242 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Takashi Yunogami, Kazuto Watanabe | 2003-09-02 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Kazuo Nojiri, Toshiyuki Arai, Miwako Nakahara +3 more | 2003-08-19 |
| 6537461 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Takashi Yunogami, Kazuto Watanabe | 2003-03-25 |