Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613242 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Takashi Yunogami, Sukeyoshi Tsunekawa, Kazuto Watanabe | 2003-09-02 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Kazuo Nojiri, Sukeyoshi Tsunekawa, Toshiyuki Arai +3 more | 2003-08-19 |
| 6537461 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Takashi Yunogami, Sukeyoshi Tsunekawa, Kazuto Watanabe | 2003-03-25 |