Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613242 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Sukeyoshi Tsunekawa, Kazuto Watanabe | 2003-09-02 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Yoshitaka Nakamura, Kazuo Nojiri, Sukeyoshi Tsunekawa, Toshiyuki Arai, Miwako Nakahara +3 more | 2003-08-19 |
| 6555464 | Semiconductor device and method of manufacturing the same | Shinichi Fukada, Kazuo Nojiri, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2003-04-29 |
| 6537461 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Sukeyoshi Tsunekawa, Kazuto Watanabe | 2003-03-25 |
| 6528400 | Method of manufacturing a semiconductor device | Shinichi Fukada, Kazuo Nojiri, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2003-03-04 |
| 6506674 | Method of manufacturing a semiconductor integrated circuit device | Takenobu Ikeda, Masahiro Tadokoro, Masaru Izawa | 2003-01-14 |