Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645870 | Process for fabricating semiconductor device | Nobuyuki Negishi | 2003-11-11 |
| 6643893 | Apparatus for cleaning semiconductor wafers in a vacuum environment | Yoshinori Momonoi, Kenetsu Yokogawa, Shinichi Tachi | 2003-11-11 |
| 6629538 | Method for cleaning semiconductor wafers in a vacuum environment | Kenetsu Yokogawa, Yoshinori Momonoi, Shinichi Tachi | 2003-10-07 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Kazuo Nojiri, Sukeyoshi Tsunekawa, Toshiyuki Arai +3 more | 2003-08-19 |
| 6573190 | Dry etching device and dry etching method | Shinichi Tachi, Kenetsu Yokogawa, Nobuyuki Negishi, Naoyuki Kofuji | 2003-06-03 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Ken'etsu Yokogawa, Yoshinori Momonoi, Nobuyuki Negishi, Shinichi Tachi | 2003-04-22 |
| 6506674 | Method of manufacturing a semiconductor integrated circuit device | Takenobu Ikeda, Masahiro Tadokoro, Takashi Yunogami | 2003-01-14 |
| 6506687 | Dry etching device and method of producing semiconductor devices | Shinichi Tachi | 2003-01-14 |