Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645870 | Process for fabricating semiconductor device | Masaru Izawa | 2003-11-11 |
| 6573190 | Dry etching device and dry etching method | Masaru Izawa, Shinichi Tachi, Kenetsu Yokogawa, Naoyuki Kofuji | 2003-06-03 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Ken'etsu Yokogawa, Yoshinori Momonoi, Masaru Izawa, Shinichi Tachi | 2003-04-22 |