Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643893 | Apparatus for cleaning semiconductor wafers in a vacuum environment | Yoshinori Momonoi, Masaru Izawa, Shinichi Tachi | 2003-11-11 |
| 6629538 | Method for cleaning semiconductor wafers in a vacuum environment | Yoshinori Momonoi, Masaru Izawa, Shinichi Tachi | 2003-10-07 |
| 6579154 | Dry chemical-mechanical polishing method | Seiji Yamamoto, Shinichi Tachi | 2003-06-17 |
| 6573190 | Dry etching device and dry etching method | Masaru Izawa, Shinichi Tachi, Nobuyuki Negishi, Naoyuki Kofuji | 2003-06-03 |
| 6511608 | Plasma processing method | Masahito Mori, Shinichi Tachi | 2003-01-28 |