Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643893 | Apparatus for cleaning semiconductor wafers in a vacuum environment | Kenetsu Yokogawa, Masaru Izawa, Shinichi Tachi | 2003-11-11 |
| 6629538 | Method for cleaning semiconductor wafers in a vacuum environment | Kenetsu Yokogawa, Masaru Izawa, Shinichi Tachi | 2003-10-07 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Ken'etsu Yokogawa, Nobuyuki Negishi, Masaru Izawa, Shinichi Tachi | 2003-04-22 |