Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643893 | Apparatus for cleaning semiconductor wafers in a vacuum environment | Yoshinori Momonoi, Kenetsu Yokogawa, Masaru Izawa | 2003-11-11 |
| 6629538 | Method for cleaning semiconductor wafers in a vacuum environment | Kenetsu Yokogawa, Yoshinori Momonoi, Masaru Izawa | 2003-10-07 |
| 6579154 | Dry chemical-mechanical polishing method | Seiji Yamamoto, Kenetsu Yokogawa | 2003-06-17 |
| 6573190 | Dry etching device and dry etching method | Masaru Izawa, Kenetsu Yokogawa, Nobuyuki Negishi, Naoyuki Kofuji | 2003-06-03 |
| 6562722 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 2003-05-13 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Ken'etsu Yokogawa, Yoshinori Momonoi, Nobuyuki Negishi, Masaru Izawa | 2003-04-22 |
| 6511608 | Plasma processing method | Masahito Mori, Kenetsu Yokogawa | 2003-01-28 |
| 6506687 | Dry etching device and method of producing semiconductor devices | Masaru Izawa | 2003-01-14 |