Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573190 | Dry etching device and dry etching method | Masaru Izawa, Shinichi Tachi, Kenetsu Yokogawa, Nobuyuki Negishi | 2003-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573190 | Dry etching device and dry etching method | Masaru Izawa, Shinichi Tachi, Kenetsu Yokogawa, Nobuyuki Negishi | 2003-06-03 |