Issued Patents 2002
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486079 | Method for stabilizing low dielectric constant materials | Cheng-Yuan Tsai, Yung-Tsung Wei, Teng-Chun Tsai | 2002-11-26 |
| 6461230 | Chemical-mechanical polishing method | Teng-Chun Tsai, Hsueh-Chung Chen | 2002-10-08 |
| 6455432 | Method for removing carbon-rich particles adhered on a copper surface | Teng-Chun Tsai, Chia-Lin Hsu, Yung-Tsung Wei | 2002-09-24 |
| 6440861 | Method of forming dual damascene structure | Chih-Chien Liu, Jui-Tsen Huang, Yi-Fang Cheng | 2002-08-27 |
| 6429115 | Method of manufacturing multilevel interconnects including performing a surface treatment to form a hydrophilic surface layer | Cheng-Yuan Tsai, Chin-Hsiang Lin | 2002-08-06 |
| 6429152 | Method of forming a thin film on a semiconductor wafer | Neng-Hui Yang | 2002-08-06 |
| 6410446 | Method for gap filling | Cheng-Yuan Tsai, Chih-Chien Liu | 2002-06-25 |
| 6410106 | Method of forming an intermetal dielectric layer | Cheng-Yuan Tsai, Chih-Chien Liu | 2002-06-25 |
| 6406978 | Method of removing silicon carbide | Neng-Hui Yang, Chien-Mei Wang | 2002-06-18 |
| 6403469 | Method of manufacturing dual damascene structure | Teng-Chun Tsai, Hsueh-Chung Chen | 2002-06-11 |
| 6387813 | Method for stripping a low dielectric film with high carbon content | Neng-Hui Yang, Chih-Chien Liu | 2002-05-14 |
| 6383913 | Method for improving surface wettability of low k material | Cheng-Yuan Tsai | 2002-05-07 |
| 6380069 | Method of removing micro-scratch on metal layer | Hsueh-Chung Chen, Yung-Tsung Wei | 2002-04-30 |
| 6376394 | Method of forming inter-metal dielectric layer | Cheng-Yuan Tsai, Chih-Chien Liu | 2002-04-23 |
| 6365228 | Process for spin-on coating with an organic material having a low dielectric constant | Cheng-Yuan Tsai, Chin-Hsiang Lin | 2002-04-02 |
| 6365527 | Method for depositing silicon carbide in semiconductor devices | Neng-Hui Yang | 2002-04-02 |
| 6362101 | Chemical mechanical polishing methods using low pH slurry mixtures | Juan-Yuan Wu, Water Lur, Shih-Wei Sun | 2002-03-26 |
| 6344408 | Method for improving non-uniformity of chemical mechanical polishing by over coating | Hsueh-Chung Chen, Juan-Yuan Wu, Water Lur | 2002-02-05 |