Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486079 | Method for stabilizing low dielectric constant materials | Cheng-Yuan Tsai, Teng-Chun Tsai, Ming-Sheng Yang | 2002-11-26 |
| 6455432 | Method for removing carbon-rich particles adhered on a copper surface | Teng-Chun Tsai, Chia-Lin Hsu, Ming-Sheng Yang | 2002-09-24 |
| 6380069 | Method of removing micro-scratch on metal layer | Hsueh-Chung Chen, Ming-Sheng Yang | 2002-04-30 |