Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486079 | Method for stabilizing low dielectric constant materials | Yung-Tsung Wei, Teng-Chun Tsai, Ming-Sheng Yang | 2002-11-26 |
| 6429115 | Method of manufacturing multilevel interconnects including performing a surface treatment to form a hydrophilic surface layer | Chin-Hsiang Lin, Ming-Sheng Yang | 2002-08-06 |
| 6410106 | Method of forming an intermetal dielectric layer | Chih-Chien Liu, Ming-Sheng Yang | 2002-06-25 |
| 6410446 | Method for gap filling | Chih-Chien Liu, Ming-Sheng Yang | 2002-06-25 |
| 6383913 | Method for improving surface wettability of low k material | Ming-Sheng Yang | 2002-05-07 |
| 6376394 | Method of forming inter-metal dielectric layer | Chih-Chien Liu, Ming-Sheng Yang | 2002-04-23 |
| 6365228 | Process for spin-on coating with an organic material having a low dielectric constant | Ming-Sheng Yang, Chin-Hsiang Lin | 2002-04-02 |