Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428938 | Phase-shift mask for printing high-resolution images and a method of fabrication | Shy-Jay Lin, Sheng-Chi Chin, Wei-Zen Chou | 2002-08-06 |
| 6429115 | Method of manufacturing multilevel interconnects including performing a surface treatment to form a hydrophilic surface layer | Cheng-Yuan Tsai, Ming-Sheng Yang | 2002-08-06 |
| 6365228 | Process for spin-on coating with an organic material having a low dielectric constant | Cheng-Yuan Tsai, Ming-Sheng Yang | 2002-04-02 |