Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428938 | Phase-shift mask for printing high-resolution images and a method of fabrication | Chin-Hsiang Lin, Sheng-Chi Chin, Wei-Zen Chou | 2002-08-06 |
| 6379849 | Method for forming binary intensity masks | Wen-Chuan Wang | 2002-04-30 |