Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428938 | Phase-shift mask for printing high-resolution images and a method of fabrication | Chin-Hsiang Lin, Shy-Jay Lin, Sheng-Chi Chin | 2002-08-06 |
| 6361911 | Using a dummy frame pattern to improve CD control of VSB E-beam exposure system and the proximity effect of laser beam exposure system and Gaussian E-beam exposure system | Fei-Gwo Tsai | 2002-03-26 |