Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383693 | Method of forming a photomask utilizing electron beam dosage compensation method employing dummy pattern | Tsiao-Chen Wu | 2002-05-07 |
| 6361911 | Using a dummy frame pattern to improve CD control of VSB E-beam exposure system and the proximity effect of laser beam exposure system and Gaussian E-beam exposure system | Wei-Zen Chou | 2002-03-26 |