Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486079 | Method for stabilizing low dielectric constant materials | Cheng-Yuan Tsai, Yung-Tsung Wei, Ming-Sheng Yang | 2002-11-26 |
| 6461230 | Chemical-mechanical polishing method | Hsueh-Chung Chen, Ming-Sheng Yang | 2002-10-08 |
| 6455432 | Method for removing carbon-rich particles adhered on a copper surface | Chia-Lin Hsu, Yung-Tsung Wei, Ming-Sheng Yang | 2002-09-24 |
| 6403469 | Method of manufacturing dual damascene structure | Hsueh-Chung Chen, Ming-Sheng Yang | 2002-06-11 |