Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461230 | Chemical-mechanical polishing method | Teng-Chun Tsai, Ming-Sheng Yang | 2002-10-08 |
| 6403469 | Method of manufacturing dual damascene structure | Teng-Chun Tsai, Ming-Sheng Yang | 2002-06-11 |
| 6380069 | Method of removing micro-scratch on metal layer | Yung-Tsung Wei, Ming-Sheng Yang | 2002-04-30 |
| 6344408 | Method for improving non-uniformity of chemical mechanical polishing by over coating | Ming-Sheng Yang, Juan-Yuan Wu, Water Lur | 2002-02-05 |