Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486040 | Chemical mechanical polishing for forming a shallow trench isolation structure | Coming Chen, Juan-Yuan Wu | 2002-11-26 |
| 6475865 | Method of fabricating semiconductor device | Gwo-Shii Yang, Tri-Rung Yew, Coming Chen | 2002-11-05 |
| 6448159 | Chemical mechanical polishing for forming a shallow trench isolation structure | Coming Chen, Juan-Yuan Wu | 2002-09-10 |
| 6362101 | Chemical mechanical polishing methods using low pH slurry mixtures | Ming-Sheng Yang, Juan-Yuan Wu, Shih-Wei Sun | 2002-03-26 |
| 6344408 | Method for improving non-uniformity of chemical mechanical polishing by over coating | Hsueh-Chung Chen, Ming-Sheng Yang, Juan-Yuan Wu | 2002-02-05 |
| 6337279 | Method of fabricating a shallow trench isolation | Chao Yuan Huang, Juan-Yuan Wu | 2002-01-08 |