Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492256 | Method for forming an interconnect structure with air gap compatible with unlanded vias | Ellis Lee | 2002-12-10 |
| 6492732 | Interconnect structure with air gap compatible with unlanded vias | Ellis Lee | 2002-12-10 |
| 6362101 | Chemical mechanical polishing methods using low pH slurry mixtures | Ming-Sheng Yang, Juan-Yuan Wu, Water Lur | 2002-03-26 |
| 6350672 | Interconnect structure with gas dielectric compatible with unlanded vias | — | 2002-02-26 |