Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429152 | Method of forming a thin film on a semiconductor wafer | Ming-Sheng Yang | 2002-08-06 |
| 6406978 | Method of removing silicon carbide | Ming-Sheng Yang, Chien-Mei Wang | 2002-06-18 |
| 6387813 | Method for stripping a low dielectric film with high carbon content | Ming-Sheng Yang, Chih-Chien Liu | 2002-05-14 |
| 6365527 | Method for depositing silicon carbide in semiconductor devices | Ming-Sheng Yang | 2002-04-02 |