Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500056 | Linear reciprocating disposable belt polishing method and apparatus | Glenn W. Travis, Erik H. Engdahl, James Bagley | 2002-12-31 |
| 6488040 | Capillary proximity heads for single wafer cleaning and drying | John M. de Larios, Mike Ravkin, Glen Travis, Jim Keller | 2002-12-03 |
| 6479443 | Cleaning solution and method for cleaning semiconductor substrates after polishing of copper film | Liming Zhang, Yuexing Zhao, Diane Hymes | 2002-11-12 |
| 6428394 | Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed | Ben Mooring, Glenn W. Travis, Erik H. Engdahl | 2002-08-06 |
| 6336845 | Method and apparatus for polishing semiconductor wafers | Erik H. Engdahl, Edward T. Ferri, Jr., Rahul Jairath, Randall L. Green, Anil K. Pant | 2002-01-08 |
| 6334229 | Apparatus for cleaning edges of contaminated substrates | Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett +3 more | 2002-01-01 |