Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482325 | Apparatus and process for separation and recovery of liquid and slurry abrasives used for polishing | Gary L. Corlett, J. Tobin Geatz | 2002-11-19 |
| 6416385 | Method and apparatus for polishing semiconductor wafers | Randall L. Green, Anil K. Pant | 2002-07-09 |
| 6379538 | Apparatus for separation and recovery of liquid and slurry abrasives used for polishing | Gary L. Corlett, J. Tobin Geatz | 2002-04-30 |
| 6336845 | Method and apparatus for polishing semiconductor wafers | Erik H. Engdahl, Wilbur C. Krusell, Rahul Jairath, Randall L. Green, Anil K. Pant | 2002-01-08 |