Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6425812 | Polishing head for chemical mechanical polishing using linear planarization technology | Douglas W. Young, Glenn W. Travis, Konstantin Volodarsky, Andrew J. Nagengast | 2002-07-30 |
| 6416385 | Method and apparatus for polishing semiconductor wafers | Edward T. Ferri, Jr., Randall L. Green | 2002-07-09 |
| 6336845 | Method and apparatus for polishing semiconductor wafers | Erik H. Engdahl, Edward T. Ferri, Jr., Wilbur C. Krusell, Rahul Jairath, Randall L. Green | 2002-01-08 |