Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416385 | Method and apparatus for polishing semiconductor wafers | Edward T. Ferri, Jr., Anil K. Pant | 2002-07-09 |
| 6336845 | Method and apparatus for polishing semiconductor wafers | Erik H. Engdahl, Edward T. Ferri, Jr., Wilbur C. Krusell, Rahul Jairath, Anil K. Pant | 2002-01-08 |