Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500056 | Linear reciprocating disposable belt polishing method and apparatus | Wilbur C. Krusell, Glenn W. Travis, James Bagley | 2002-12-31 |
| 6428394 | Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed | Ben Mooring, Wilbur C. Krusell, Glenn W. Travis | 2002-08-06 |
| 6336845 | Method and apparatus for polishing semiconductor wafers | Edward T. Ferri, Jr., Wilbur C. Krusell, Rahul Jairath, Randall L. Green, Anil K. Pant | 2002-01-08 |