Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500056 | Linear reciprocating disposable belt polishing method and apparatus | Wilbur C. Krusell, Erik H. Engdahl, James Bagley | 2002-12-31 |
| 6486550 | Locking mechanism for detachably securing a wafer carrier to a conveyor | — | 2002-11-26 |
| 6428394 | Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed | Ben Mooring, Wilbur C. Krusell, Erik H. Engdahl | 2002-08-06 |
| 6425812 | Polishing head for chemical mechanical polishing using linear planarization technology | Anil K. Pant, Douglas W. Young, Konstantin Volodarsky, Andrew J. Nagengast | 2002-07-30 |
| 6409051 | Method and apparatus for dispensing a fluid media | — | 2002-06-25 |